Get a Quote
Get a Quote

Vacuum Bearings

Vacuum bearings are specially engineered for operation in vacuum, cleanroom, and ultra-high vacuum (UHV) environments, where low outgassing, minimal particle generation, stable lubrication, corrosion resistance, and thermal stability are essential.
Although they retain the basic rolling bearing structure—including inner ring, outer ring, rolling elements, cage or retainer, and lubrication system—vacuum bearings often incorporate specialized designs to improve performance under vacuum conditions. Common configurations include open or shielded designs, hybrid structures, full-ceramic constructions, spacer-joint or solid-lubricant cage structures, and duplex angular contact arrangements.
To meet demanding vacuum application requirements, vacuum bearings are manufactured using carefully selected materials such as stainless steel, high-grade martensitic stainless bearing steel (such as 440C), nitrogen-enriched stainless steel for advanced UHV applications, and ceramic materials for full-ceramic designs.
Rolling elements may use stainless steel balls, silicon nitride ceramic balls, or full ceramic balls, while cage materials commonly include stainless steel, PTFE, PEEK, fluororesin self-lubricating materials, and special high-temperature solid-lubricant spacer structures.
For lubrication, vacuum bearings typically use low-volatility vacuum grease or perfluorinated grease to ensure low outgassing and long-term reliability in sensitive environments.

Get a Quote
Vacuum Bearings Are Specially Engineered For Operation In Vacuum

Characteristics and Benefits of Vacuum Bearings

Vacuum bearings combine low-outgassing materials, special lubrication methods, and optimized structural designs to achieve stable running accuracy, improved thermal performance, reduced lubrication problems, and reliable service in vacuum and contamination-sensitive environments.

Characteristics of Vacuum Bearings

Low-outgassing Materials

Vacuum bearings use low-outgassing materials such as 440C stainless steel, silicon nitride ceramic balls, full-ceramic components, and engineering polymers like PEEK. These materials help reduce gas release, lower particle generation, improve corrosion resistance, and maintain cleaner operation in vacuum and contamination-sensitive environments.

Special Lubricants or Dry Lubrication

To avoid the volatility and contamination risk of conventional grease, vacuum bearings often use solid lubricants such as MoS₂, WS₂, and silver films, together with fluororesin self-lubricating cages, solid-lubricant spacers, or PFPE-based lubricants. These solutions improve lubrication stability and cleanliness under vacuum conditions.

Cleanroom and Corrosive Environment Compatibility

Vacuum bearings are widely used in cleanroom, semiconductor, transfer, inspection, and other precision environments where low particle emission, corrosion resistance, and lubrication cleanliness are critical. Material selection and lubrication design help protect sensitive equipment and process stability.

Shielded or Open Configuration

Vacuum bearings are commonly available in open or shielded designs depending on lubrication method and cleanliness requirements. Open types are suitable for very low outgassing or bakeout conditions, while shielded designs help limit particle entry and retain lubrication without using contact seals.

Different Designs for Different Operating Conditions

Vacuum bearings are available in hybrid ceramic, high-temperature, corrosion-resistant, ultra-clean, and special structural designs. Different configurations are selected according to vacuum level, speed, temperature, cleanliness requirements, and operating conditions to better match equipment performance demands.

Benefits of Vacuum Bearings

Stable Running Accuracy in Vacuum Environment

Vacuum bearings maintain stable running accuracy by using clean-running materials, precision raceway geometry, and low-particle-generation designs. Ceramic rolling elements, stainless steel rings, and vacuum-compatible cage materials help reduce vibration, maintain rotational consistency, and preserve accuracy under vacuum operating conditions.

Reduced Lubrication Problems

Many vacuum bearings use solid lubricants, self-lubricating cage materials, thin-film coatings, or low-vapor-pressure lubricants instead of conventional grease. These solutions help reduce lubricant evaporation, migration, and contamination while improving lubrication reliability in vacuum environments.

Better Thermal Performance

Vacuum bearings achieve better thermal performance through reduced friction, lightweight rolling elements, and heat-stable lubrication systems. Ceramic balls can lower centrifugal force and frictional heat, helping the bearing run more efficiently under vacuum conditions.

Longer Service Life in Special Environments

Vacuum bearings can achieve longer service life through corrosion-resistant materials, reduced wear, contamination control, and stable internal operating conditions. These features help improve durability in vacuum, cleanroom, and other contamination-sensitive applications.

High-Temperature Capability

High-temperature capability comes from heat-resistant bearing steels, ceramic materials, and solid lubrication systems that remain stable where conventional grease may degrade. These designs help maintain bearing function under elevated vacuum operating temperatures.

Get a Quote

Types of Bearings for Vacuum Environments

Various bearing types can be used in vacuum environments by applying vacuum-compatible materials, lubrication systems, and structural designs.

Hybrid Ceramic Bearings For Vacuum

Hybrid Ceramic Bearings

Hybrid ceramic bearings use stainless steel rings with silicon nitride ceramic balls, combined with low-outgassing lubrication or self-lubricating cage materials for vacuum service. Their structure reduces heat generation, friction, and corrosion risk at high speed. They are widely used in vacuum transfer equipment, inspection systems, semiconductor machinery, and precision scientific instruments.

Get a Quote >>

All Ceramic Bearings For Vacuum

All-Ceramic Bearings

All-ceramic bearings use ceramic inner rings, outer rings, and balls, often combined with PTFE or PEEK cages for low-outgassing, non-magnetic, and corrosion-resistant vacuum operation. Their fully ceramic structure supports clean running with little or no grease. They are commonly used in semiconductor equipment, optical systems, cleanroom devices, and ultra-high-vacuum instruments.

Get a Quote >>

Deep Groove Ball Bearings For Vacuum

Deep Groove Ball Bearings

Vacuum deep groove ball bearings are commonly made from stainless steel and use open or shielded designs with low-volatility vacuum grease or dry-film lubrication. Their simple structure provides low friction, smooth running, and reliable radial support with moderate axial load capacity. They are often used in vacuum pumps, chamber transport systems, clean equipment, and semiconductor handling devices.

Get a Quote >>

Angular Contact Ball Bearings With Bkz Box

Angular Contact Ball Bearings

Angular contact ball bearings for vacuum use are typically made from stainless steel or hybrid ceramic materials and use vacuum-compatible lubrication with duplex mounting for accurate shaft positioning. Their structure supports combined radial and axial loads at high speed with high running precision. They are mainly used in molecular pumps, screw vacuum pumps, turbo systems, and semiconductor spindle units.

Get a Quote >>

Four Point Contact Ball Bearings With Box

Four-Point Contact Ball Bearings

Four-point contact ball bearings for vacuum applications use corrosion-resistant materials, low-outgassing lubricants, and compact internal geometry to support axial loads in both directions within one bearing. Their four-point raceway contact design saves space while simplifying the arrangement. They are suitable for vacuum rotary tables, precision positioning systems, scientific instruments, and compact semiconductor motion equipment.

Get a Quote >>

Thin Section Ball Bearings

Thin Section Ball Bearings

Thin section ball bearings use slim cross-section rings in stainless steel, hybrid ceramic, or all-ceramic versions, combined with low-outgassing lubrication and clean assembly for vacuum environments. Their lightweight, space-saving structure is ideal where installation space is limited but accuracy is still required. They are widely used in vacuum robots, semiconductor transfer systems, aerospace mechanisms, and precision automation equipment.

Get a Quote >>

*Other types not listed here are also available from BKZ Industry. Please contact us for more details.

Vacuum Bearing Size Chart

Vacuum bearings do not have a single ISO size chart of their own, because “vacuum bearing” describes the operating environment rather than one standardized bearing series. In practice, many vacuum bearings use standard ISO bearing dimensions, combined with vacuum-compatible materials, low-outgassing lubrication, or dry-running designs. Here are some exmaples for your reference. For your applications, please contact us. 

Get a Quote
Bearing Number Bearing Type Bore Diameter d (mm) Outside Diameter D (mm) Width B (mm) Operating Temperature Range (°C) Applicable Pressure Range (mbar) Ring Material Rolling Element Material Cage Material Lubrication Type Lubricant / Coating Seal / Shield Type Weight (kg)
6000 Deep Groove Ball Bearings 10 26 8 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.019
6001 Deep Groove Ball Bearings 12 28 8 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.022
6002 Deep Groove Ball Bearings 15 32 9 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.03
6003 Deep Groove Ball Bearings 17 35 10 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.039
6004 Deep Groove Ball Bearings 20 42 12 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.069
6005 Deep Groove Ball Bearings 25 47 12 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.079
6006 Deep Groove Ball Bearings 30 55 13 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.116
6007 Deep Groove Ball Bearings 35 62 14 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.155
6008 Deep Groove Ball Bearings 40 68 15 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.19
6009 Deep Groove Ball Bearings 45 75 16 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.245
6010 Deep Groove Ball Bearings 50 80 16 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.26
6011 Deep Groove Ball Bearings 55 90 18 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.39
6012 Deep Groove Ball Bearings 60 95 18 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.43
6013 Deep Groove Ball Bearings 65 100 18 -40 to +200 1×10^-7 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Stainless steel / PEEK Vacuum grease or dry film Low-volatility grease / MoS2 / WS2 Open or shielded 0.44
7000 Angular Contact Ball Bearings 10 26 8 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.019
7001 Angular Contact Ball Bearings 12 28 8 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.022
7002 Angular Contact Ball Bearings 15 32 9 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.03
7003 Angular Contact Ball Bearings 17 35 10 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.039
7004 Angular Contact Ball Bearings 20 42 12 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.069
7005 Angular Contact Ball Bearings 25 47 12 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.079
7006 Angular Contact Ball Bearings 30 55 13 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.116
7007 Angular Contact Ball Bearings 35 62 14 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.155
7008 Angular Contact Ball Bearings 40 68 15 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.19
7009 Angular Contact Ball Bearings 45 75 16 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.245
7010 Angular Contact Ball Bearings 50 80 16 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.26
7011 Angular Contact Ball Bearings 55 90 18 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.39
7012 Angular Contact Ball Bearings 60 95 18 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.43
7013 Angular Contact Ball Bearings 65 100 18 -30 to +180 1×10^-6 to 1×10^-2 Stainless steel Stainless steel or Si3N4 Phenolic / PEEK / stainless steel Vacuum grease or dry film Low-volatility grease / dry film Open 0.44
61800 Thin Section Bearings 10 19 5 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.007
61801 Thin Section Bearings 12 21 5 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.008
61802 Thin Section Bearings 15 24 5 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.01
61803 Thin Section Bearings 17 26 5 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.012
61804 Thin Section Bearings 20 32 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.023
61805 Thin Section Bearings 25 37 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.028
61806 Thin Section Bearings 30 42 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.032
61807 Thin Section Bearings 35 47 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.038
61808 Thin Section Bearings 40 52 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.045
61809 Thin Section Bearings 45 58 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.054
61810 Thin Section Bearings 50 65 7 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.068
61811 Thin Section Bearings 55 72 9 -40 to +180 1×10^-7 to 1×10^-3 Stainless steel Stainless steel or Si3N4 PEEK / PTFE / stainless steel Vacuum grease or dry film Low-outgassing grease / dry film Open or shielded 0.098

Vacuum Bearing Applications

Vacuum bearings are widely used in equipment operating under vacuum, cleanroom, or contamination-sensitive conditions where low outgassing, clean lubrication, and stable running performance are required.

FAQs About Vacuum Bearings

Q1. What Is the Difference Between Vacuum Bearings and Cleanroom Bearings?

Vacuum bearings are designed for vacuum operation, while cleanroom bearings are designed for clean air environments. Vacuum bearings focus on low outgassing and stable lubrication without air convection, while cleanroom bearings mainly control particle generation, grease leakage, and surface cleanliness under atmospheric conditions.

UHV bearings are a stricter type of vacuum bearing designed for ultra-high vacuum conditions. Because UHV systems are highly sensitive to vapor contamination, these bearings require lower-outgassing materials, stricter cleaning, limited lubricant options, and better bakeout compatibility than standard vacuum bearings.

Space bearings must survive not only vacuum, but also radiation, very long life requirements, launch vibration, extreme temperature swings, and strict torque stability. A vacuum bearing is designed for chamber or process vacuum on Earth; a space bearing is designed for the broader and harsher space mission environment.

Standard bearings are usually not suitable for vacuum service. Conventional grease or oil can evaporate or spread in vacuum, causing contamination, lubrication loss, unstable friction, and shorter bearing life, while standard seals and materials may also fail to meet vacuum cleanliness requirements.

Lubrication, outgassing, particle control, and heat dissipation are the main challenges in vacuum bearings. Vacuum removes normal air cooling and makes conventional lubricants unstable, so materials, lubrication systems, and bearing structures must be specially selected.

Semiconductor, vacuum coating, scientific instruments, aerospace, and medical equipment use vacuum bearings most. These industries require low contamination, reliable motion, and stable lubrication because even small vapor or particle release can affect process accuracy.

Low outgassing means low gas release, while low particle generation means low solid debris production. Gas contamination affects vacuum purity, while particles can damage wafers, optics, and sensitive surfaces, so both are critical in vacuum systems.

More FAQS >>

More Bearing Solutions for Different Environments

BKZ Industry also offers bearing solutions for various special environments and demanding operating conditions.

get a quote from bkz industry bearing experts

Get a Fast Quote for Vacuum Bearings

Send us your dimensions, vacuum conditions, speed, load, lubrication needs, or technical requirements, and our team will quickly recommend suitable bearing solutions and pricing.

Get a Quote

Get Quotation Now

Complete the form below for a quote, or contact us at sales@bkzindustry.com or +86 18901426056 (WhatsApp/phone).